Abstract
Electron energy probability functions (EEPFs) are investigated in inductive C2F6/Ar and C2F6/O2 discharges. The structure of the EEPFs changes from bi-Maxwellian to Druyvesteyn-like distributions through a Maxwellian one with increasing Ar content, whereas the EEPFs form the bi-Maxwellian structure at any oxygen content except for pure oxygen. Dependences of both the fluorine atom density measured by actinometry and the relative variation of CF2 density determined from an optical emission at 251.9 nm on the dilution gas content are also investigated. The densities of F and CF2 are independent of the Ar content, while they depend strongly on the oxygen content.
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