Abstract
The Bi 3.15Nd 0.85Ti 3-xZr xO 12 (BNTZ) thin films with Zr content ( x = 0, 0.05, 0. 1, 0.15, and 0.2) were prepared on Pt/Ti/SiO 2/Si (100) substrates by chemical solution deposition (CSD) technique. The crystal structures of BNTZ films were analyzed by X-ray diffraction (XRD). The effects of Zr contents on the ferroelectric, dielectric properties, and leakage current of BNTZ films were thoroughly investigated. The XRD results demonstrated that all the films possessed a single phase bismuth-layered structure and exhibited the highly preferred (117) orientation. Among these films, the film with Zr content x = 0.1 held the maximum remanent polarization (2P r) of 50.21 μC/cm 2 and a low coercive field (2E c) of 210 kV/cm.
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