Dependence of the self-sputtering yield upon ion incidence angle

Abstract

Solution of the problem of angular dependence of sputtering yield is divided into three parts: calculation of the number of cascade particles as a function of their path length, definition of the path length distribution of reflected particles, and convolution of the two results obtained. The theory is valid for the case of equal ion and target atom masses (self-sputtering) and contains two parameters: the ratio of the transport path length to the mean free path length and the parameter of inelastic energy losses.