Abstract
We demonstrate the feasibility of micromachined tuneable gold cantilever beams. The test structures, composed of a deflectable cantilever microbeam, two lateral driving electrodes and a working part, are fabricated using a micromachining process with a single mask. The microbeams are typically 1 μm wide and 2 μm high, with variable lengths ranging from 40 to 60 /gmm to achieve natural resonant frequencies ( f 0) greater than 100 kHz. These resonators are electrostatically excited with a signal: v( t) = V p + v sin ωt. Varying the polarisation voltage ( V p) produced a shift in the observed resonant frequency ( f obs) of a few percent around f 0, which makes this system tuneable. We describe the fabrication process, the frequency response and the frequency response and the frequency tuning of this device.
Published Version
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