Abstract
The low-energy spectrum of ions reflected from the surface of a solid is calculated theoretically and by means of the computer simulation method. The theory is based on numerical solution of the transport equation by of the method of discrete streams; and computer simulation, on the model of binary collisions and local inelastic energy losses. It is shown that, for small energies of reflected ions, their energy distributions are described by the universal formula containing the only constant. The value of this constant varies weakly when passing from the hard-core potential to the Coulomb one.
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