Abstract

We have investigated the magnetic anisotropy and permeability of FeAlO films with Bs∼1.8 T and ρ∼1 µΩm. The films were prepared using a carousel-type sputtering system. Although an aligning magnetic field to induce uniaxial magnetic anisotropy was not applied to the substrates during deposition, the FeAlO films in the as-deposited state had uniaxial magnetic anisotropy. The anisotropy strongly depends on sputtering pressure. The direction of the magnetic anisotropy shifts 90° from the rotation direction to the radial direction of the substrate holder as the sputtering pressure increases. In the pressure range of 0.3–0.4 Pa, the measured µ–f properties are largely different from the theoretical one because of magnetic anisotropy dispersion. The anisotropy dispersion can be explained by a model with two orthogonal anisotropy components.

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