Abstract
Magnetic properties, Young’s modulus, and corrosion resistance of Co-Pt films deposited by targets-facing type of sputtering (TFTS) have been investigated. The films deposited at a Ar gas pressure PAr of 2 mTorr present good surface smoothness and dense texture. The c axis of the hexagonal crystallites in the film orients normal to the film plane. The films have nearly the same value of Young’s modulus (≊17×1011 dyn/cm2) as that of the bulk Co-Pt alloy. On the other hand, the films deposited at PAr of 30 mTorr exhibit rough surface and columnar structure and do not exhibit any preferred orientation of crystallites. In addition, they have a small value of Young’s modulus (≊5×1011 dyn/cm2) and poor corrosion resistance compared with the film deposited at low PAr. They have coercive force Hc larger than 1 kOe, which is mainly caused by their porous structure. Besides, the Co-Pt films have large in-plane uniaxial magnetic anisotropy, which is caused by both dc magnetic field applied to substrate during deposition and oblique incidence of sputtered particles upon substrate.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
