Abstract
The effect of orientation and composition on electrically induced strain and relative permittivity of 600-nm-thick Pb(ZrxTi1-x)O3 (PZT) films was investigated. High permittivity was obtained near the morphotropic phase boundary (MPB) composition, unaffected by orientation. For films with mixed textures of [111] and [100], the electrically induced strain was maximum near the MPB composition. While the electrically induced strain showed a tendency to increase with increasing Zr concentration x in the films with [111] preferred orientation, for the Pb(Zr0.65Ti0.35)O3 film with [111] preferred orientation, an electrically induced strain of 0.54% was obtained under an electric field of 250 kV/cm.
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