Abstract

We have performed a computer simulation of the current during anodization of InP in aqueous KOH electrolyte based on the spatial characteristics of the porous structures that are formed. Specifically, we have developed a model, based on the expansion and merging of the porous domains and compared current densities during linear potential sweep and potentiostatic experiments to their respective simulated current-density data. Furthermore, we have compared the expected pore structure at particular stages of etching with corresponding micrographs. From these investigations we are able to demonstrate how the porous structure influences the observed current density.

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