Abstract

The effect of micro-morphology of resistive strain gauges on gauge factor was investigated numerically and experimentally. Based on the observed dimensional parameters of various commercial resistive strain gauges, a modeling method had been proposed to reconstruct the rough sidewall on the sensitive grids. Both the amplitude and period of sidewall profiles are normalized by the sensitive grid width. The relative resistance change of the strain gauge model with varying sidewall profiles was calculated. The results indicate that the micro-morphology on the sidewall profile led to the deviation of the relative resistance change and the decrease in gauge factor. To verify these conclusions, two groups of the strain gauge samples with different qualities of sidewall profiles have been manufactured, and both their relative resistance changes and gauge factors were measured by a testing apparatus for strain gauge parameters. It turned out that the experimental results are also consistent with the simulations. Under the loading strain within 1000 μm/m, the average gauge factors of these two groups of samples are 2.126 and 2.106, respectively, the samples with rougher profiles have lower values in gauge factors. The reduction in the gauge factor decreases the sensitivity by 2.0%. Our work shows that the sidewall micro-morphology on sensitive grids plays a role in the change of the gauge factor. The observed phenomena help derive correction methods for strain gauge measurements and predict the measurement errors coming from the local and global reinforcement effects.

Highlights

  • Published: 10 February 2022Strain gauges are commonly used in aerospace, transportation, automotive industry, civil engineering, and even in the medical field

  • The term to describe the correlation between these two variables is called gauge factor (GF), which is defined as the ratio of the relative resistance change (RRC) to the strain [4]: Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations

  • In order to calibrate the GF obtained by strain gauges during measurements and improve the long-term stability of resistive strain sensors, we observed the micro-morphology on various commercial strain gauges and calculated the geometrical parameters of the sidewall profiles

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Summary

Introduction

Strain gauges are commonly used in aerospace, transportation, automotive industry, civil engineering, and even in the medical field. The sensitive grid patterns are usually fabricated by the processes of lithography and wet etching, whose poor selectivity of the damp etching results in irregular sidewall micro-morphology on sensitive grids [6] These defects induce the electrical conductivity deviation of resistive strain gauges. In order to calibrate the GF obtained by strain gauges during measurements and improve the long-term stability of resistive strain sensors, we observed the micro-morphology on various commercial strain gauges and calculated the geometrical parameters of the sidewall profiles. Thereby, the focus has been laid on the sidewall micro-morphology of the sensitive grids, which would change the stress–strain characteristics of resistive strain gauges

Geometrical Model and Simulations
Experimental Results and Discussion
Conclusions
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