Densification of AlN ceramics by spark plasma sintering under 1550 °C

Abstract

We fabricated AlN ceramics at sintering temperatures with a minimum of 1450°C using spark plasma sintering (SPS) with Y2O3–CaO–B or Y2O3–CaO–LaB6 sintering additives. The relative densities of the AlN ceramics sintered at 1500°C for 10min with a uniaxial pressure of 50MPa exceeded 98%, indicating sufficient densification. However, with decreasing the sintering temperature to 1450°C, the relative densities were decreased to ∼90%. An increase in the uniaxial pressure to 100MPa or the extension of sintering time to 30min were found to promote the densification of AlN ceramics. The relative densities of the AlN ceramics sintered reached 99% even at a sintering temperature of 1450°C. The samples had dense and fine textures with an average grain size of ∼1μm. The thermal conductivities of the samples varied with relative density between 30 and 80Wm−1K−1.