Demonstration of broadband and polarization-insensitive silicon photonics 3 dB splitter compatible with CMOS process

Abstract

We demonstrate a broadband and polarization insensitive 3 dB power splitter compatible with CMOS process. The simulation results show low insertion loss in the wavelength range from 1460 to 1640 nm for both TE and TM polarization. The fabricated device has a maximum insertion loss of 0.5 dB and 0.07 dB for TE and TM polarization, respectively, from 1520 to 1580 nm wavelength.