Demonstration of Arrays of Sub-Micrometer Solid-State Fresnel Lenses for Electrons

Abstract

AbstractWe demonstrate the focusing action of a compact solid state pixelated Fresnel phase (PFP) lens for electrons (700 nm in diameter), consisting of an array of holes (“pixelated”) directly drilled by a finely focused electron beam in a thin AlF3 thin film on carbon supporting film. The depths of holes, hence the phase of the exit electron wave is varied as a function of radius from the center of the pattern so that the wavelet from each hole can be in phase on axis at a designated focal point thus producing a lens. An array of two types of lenses, convergent and divergent, with nominal focal length of 1 mm for 200 keV electrons was produced. The estimated full-width-half-maximum of the focus is 8 nm. With improvement of the efficiency, these lenses may find applications in parallel electron-beam lithography, in X-ray optics and in light optics.