Abstract
Together with the optimal basic design, buried heterostructure quantum cascade laser (BH-QCL) with semi-insulating regrowth offers a unique possibility to achieve an effective thermal dissipation and lateral single mode. We demonstrate here the realization of BH-QCLs with a single-step regrowth of highly resistive (>1×108 ohm·cm) semi-insulating InP:Fe in <45 min for the first time in a flexible hydride vapor phase epitaxy process for burying ridges etched down to 10 to 15 μm depth, both with and without mask overhang. The fabricated BH-QCLs emitting at ∼4.7 and ∼5.5 μm were characterized. 2-mm-long 5.5-μm lasers with a ridge width of 17 to 22 μm, regrown with mask overhang, exhibited no leakage current. Large width and high doping in the structure did not permit high current density for continuous wave (CW) operation. 5-mm-long 4.7-μm BH-QCLs of ridge widths varying from 6 to 14 μm regrown without mask overhang, besides being spatially monomode, TM00, exhibited wall plug efficiency (WPE) of ∼8 to 9% with an output power of 1.5 to 2.5 W at room temperature and under CW operation. Thus, we demonstrate a quick, flexible, and single-step regrowth process with good planarization for realizing buried QCLs leading to monomode, high power, and high WPE.
Highlights
Quantum cascade lasers (QCL) emerging from the physical concepts of the amplification of electromagnetic waves in a semiconductor superlattice[1] was first demonstrated by Faist and coworkers.[2]
We demonstrate the realization of buried heterostructure QCL (BH-QCL) for the first time by hydride vapor phase epitaxy (HVPE)
We demonstrated a quick process to achieve BH-QCL, leading to high power and wall plug efficiency (WPE)
Summary
Quantum cascade lasers (QCL) emerging from the physical concepts of the amplification of electromagnetic waves in a semiconductor superlattice[1] was first demonstrated by Faist and coworkers.[2] It is shown to cover a wide range of the electromagnetic spectrum from near-infrared to midterahertz.[3,4] In virtue of such a wide coverage of wavelengths, QCLs have become attractive sources for spectroscopy, medical and biosensing, remote gas sensing, free-space communication, and applications in defense security countermeasures Several of these application areas necessitate high power, good beam quality, efficient thermal dissipation, and high wall plug efficiency (WPE). This leads to more reproducible results, but at the expense of lower performances
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