Demonstration of 200-, 100-, and 50-$\mu$ m Pitch Resistive AC-Coupled Silicon Detectors (RSD) With 100% Fill-Factor for 4D Particle Tracking

Marco Mandurrino,M Tornago,G F Dalla Betta,M Boscardin,F Ficorella,M Ferrero,L Pancheri,G Paternoster,N Cartiglia,R Arcidiacono,F Siviero

doi:10.1109/led.2019.2943242

Demonstration of 200-, 100-, and 50-$\mu$ m Pitch Resistive AC-Coupled Silicon Detectors (RSD) With 100% Fill-Factor for 4D Particle Tracking

Marco Mandurrino, M Tornago + Show 9 more

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https://doi.org/10.1109/led.2019.2943242

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Journal: IEEE Electron Device Letters	Publication Date: Nov 1, 2019
Citations: 42	License type: publisher-specific, author manuscript

Affiliation: INFN Sezione di Torino, Trento Institute for Fundamental Physics and Applications, Fondazione Bruno Kessler, University of Turin, University of Trento, University of Eastern Piedmont Amadeo Avogadro, European Organization for Nuclear Research

#Resistive Sheet #Fine Pitch + Show 8 more

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Abstract

We designed, produced, and tested RSD (Resistive AC-Coupled Silicon Detectors) devices, an evolution of the standard LGAD (Low-Gain Avalanche Diode) technology where a resistive n-type implant and a coupling dielectric layer have been implemented. The first feature works as a resistive sheet, freezing the multiplied charges, while the second one acts as a capacitive coupling for readout pads. We succeeded in the challenging goal of obtaining very fine pitch (50, 100, and 200 um) while maintaining the signal waveforms suitable for high timing and 4D-tracking performances, as in the standard LGAD-based devices.

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