Abstract

Fe55Pt45 thin film permanent magnets having a thickness of 120nm are irradiated with 180keV 4He and 90keV H ions. In-plane and out-of-plane coercivities of the magnets are decreased to half by irradiation with the 4He ions at a fluence of 3.2×1015ions/cm2 or with the H ions at a fluence of 5.7×1016ions/cm2. In-plane magnetizations without a magnetic field are decreased by 10%, but out-of-plane magnetizations without a magnetic field are decreased by 90% by irradiation with the 4He ions at a fluence of 1×1016ions/cm2 or with the H ions at a fluence of 3×1017ions/cm2. Because their magnetizations do not recover to their original levels prior to the irradiation by re-magnetization in a magnetic field of 40kOe, it is proved that the degradation is caused by disorder of crystallographic structure. Atomic densities of the Fe and the Pt atoms displaced from their lattice sites are calculated as a function of depth by a TRIM simulation program.

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