Abstract
,Deformation of single crystal sheets, used as substrates for epitaxial structures, reduces the yield of suitable products [1]. In this work, we examine low-dislocation single crystal sheets which are deformed mainly as a result of the presence of point-type defects in their volume. This type of defect can be caused both by chemical heterogeneity of the composition in respect of the main components of the solid solution of the compound in its homogeneity region as well as by the nonuniform distribution of impurities in the volume of the single crystal. Analysis of deformation was carried out in the dimensionless forms so that the results can be used for a wide range of materials with the examined type of structural heterogeneity. Calculations were also carried out for typical parameters of the structure of the specific material, i.e,, gadolinium---gallium garnet.
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