Abstract
The out-of-plane displacement of a cantilever is measured by phase-shifting digital holography. From four phase-shifted holograms of a cantilever recorded by a CCD image sensor, a complex amplitude at each pixel of the CCD plane is obtained using the conventional phase-shifting method. The complex amplitude of a cantilever is reconstructed from the complex amplitude of the CCD plane using the Fresnel diffraction integral. The phase difference distribution on the cantilever before and after deformation, i.e., the out-of-plane displacement distribution, is calculated. In order to decrease the effect of speckle noise, a new method using divided holograms is proposed. The theory and experimental results are shown.
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