Abstract
Plasma immersion ion implantation and deposition (PIIID) provides a novel approach to fabricate high quality films by means of utilizing particle filtrated metal plasma and varying acceleration pulse voltages. In this work, investigation on plastic deformation of TiN films synthesized by PIIID was performed by pulling the TiN film-coated stainless steel sheet samples. The surface morphology during the pulling was observed in situ by scanning electron microscopy. No delaminating, peeling or cracking were found on the coating surfaces. The structure of the films was identified by transmission electron microscopy and atom force microscopy. It is considered that the excellent deformation behavior of the TiN film was related with the nanocrystal structure of the films and the broader film/matrix interface achieved by the PIII process.
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