Abstract
A novel approach is developed to study a film-overlapped membrane structure. Meanwhile,the established model is employed to design the micro-pump membrane structure and toevaluate its pumping efficiency. Two-dimensional coupling effects between the overlappingactuator films and the deformable membrane are thoroughly investigated, including theinfluences on the membrane from the overlapping films’ elongation effects, Poisson’s ratioeffects and shear strain effects. Overall deformations and interactions for the three-layermembrane structures are accurately calculated through exercising the developed model, incontrast to what difficulties are usually encountered in carrying out FEM methodswith very thin elements meshed for the actuator films. Furthermore, this studydemonstrates that the high stiffness of the actuating metal films needs to be reflected inthe equivalent stiffness of the membrane structures, especially when the sizes ofthe actuator films become compatible with the sizes of the membranes. Hence,the optimal micro-pumping efficiency of a membrane structure is acquired uponexercising the developed model, and larger sizes of the actuating films do notdefinitely obtain larger pumping efficiencies for the electromagnetically actuatedmicro-pumps.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
