Abstract
B2H6/He plasma and B2H6/H2/He plasma treatments of PTFE were performed. Concentration of the B2H6 was varied through this experiment. Then defluorination degree and adhesive strength were measured. While B2H6 and hydrogen were effective for defluorination of PTFE surface, oxygen functional groups generated by post-oxidation improved adhesive strength. The atmospheric pressure glow plasma treatment with lower diborane concentration more modifies PTFE surface.
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