Abstract
Differential capacitance detection, a common high resolution proof mass displacement detection scheme, is adopted in the gyroscope to measure the rotor deflection angle by installing an electrode with four poles under the rotor disk, which forms four detection capacitors and opposite ones form a differential capacitance detection pair. Theoretical inference explains the approximately proportional relationship between the capacitance difference and the rotor deflection angle. Simulation in Ansys Maxwell verifies the inference and confirms the differential capacitance detection range of the rotor deflection angle to 0–1°, limited by linearity. A signal processing system is constructed, obtaining a DC output voltage proportional to the measured input angular speed. Experiment shows the fabricated gyroscope with the designed differential capacitance detection pairs exhibits excellent performance with the resolution and the bias stability of 0.1 °/s and 0.5 °/h, respectively.
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