Defects in nonpolar (134¯) ZnO epitaxial film grown on (114) LaAlO3 substrate

Abstract

The defects in (134¯0)ZnO epitaxial film grown on (114)LaAlO3 (LAO) have been systematically investigated by using transmission electron microscopy. At the ZnO/LAO interface, the Burgers vectors of misfit dislocations are identified to be 1/3[1¯21¯0] and 1/2[0001]. Threading dislocations with the Burgers vectors of 1/3⟨112¯0⟩ and ⟨0001⟩ are distributed on the basal plane. In (134¯0)ZnO film, the predominant planar defects are basal stacking faults (BSFs) with 1/6⟨202¯3⟩ displacement vectors. The densities of dislocations and BSFs are about 3.8 × 1010 cm−2 and 3.1 × 105 cm−1, respectively.