Abstract
Surface defects in fused silica have been characterized using Near Field Scanning Optical Microscopy (NSOM). Using total internal reflection of a p- or s- polarized laser beam, optical scattering from defects located on the surface itself as well as in the subsurface layer of polished fused silica has been measured by NSOM. The local scattering intensity has been compared with simultaneously measured surface topography. In addition, surface defects intentionally created on a fused silica surface by nano-indentation have been used to establish a correlation between optical scattering of s- and p- polarized light, surface morphology and the well known subsurface stress-field associated with nano-indentation.
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