Abstract

Effects of growth temperature and Si doping on the formation of vacancy defects in molecular beam epitaxy GaCrN films have been studied by positron annihilation spectroscopy. No vacancy defects were detected in the GaCrN films grown at 700oC. In the undoped GaCrN film grown at 540oC, vacancy clusters with sizes of V8 to V12 were responsible for positron trapping. Vacancy clusters were much reduced by Si doping, but complexes related to nitrogen vacancies still survived.

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