Abstract
The structures of nanodefect ensembles formed on the surfaces of copper, gold, and molybdenum under a load have been investigated. The properties of the defect ensembles are described in the framework of the reversible aggregation model. The size distribution of nanodefects is thermodynamically determined by the maximum “entropy of their mixing” with atoms of the crystal lattice. The entropy of mixing reaches a maximum value at a small concentration of defects due to a considerable difference in the sizes of defects and atoms. This concentration agrees closely with the experimental data. The reduced size distribution of defects is universal.
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