Defect and Contamination Analysis Necessity with Multiple Surface Analytical Techniques

Abstract

Single technique that works for most contamination analysis in the past may not be applicable for the contamination that has very low aspect ratio where the thickness can be as thin as nm range while the lateral dimension extends to a few micrometers or more. Therefore, multiple techniques have to be employed for a better understanding of the origin of the contamination. This paper reported few cases where multiple surface analytical techniques are needed with consideration of their analysis sequence in order to identify the contamination characteristics.