Deep-UV emission at 260 nm from MBE-grown AlGaN/AlN quantum-well structures

Abstract

Deep ultraviolet (UV) emission at 260 nm has been obtained from high Al content AlGaN/AlN multi-quantum well (MQW) structures by plasma-assisted molecular beam epitaxy (PA-MBE) on AlN template on sapphire substrates. The effect of III/V ratio and growth temperature on structural and optical properties of AlGaN was studied. It was observed that Al content in AlGaN material increased with increasing Al flux ratio or growth temperature. By altering growth conditions, AlGaN with high Al content of 47–80% was obtained. Further studies indicate that AlGaN layers have excellent surface morphology and optical properties grown in slightly metal-rich condition. As for AlGaN/AlN MQW, the emission wavelength was tuned by controlling the thickness of AlGaN quantum well, and deep ultraviolet emission below up to 260 nm was obtained from AlGaN (2.4 nm)/AlN(6.9 nm) MQW at room temperature.