Deep traps in n-type GaN epilayers grown by plasma assisted molecular beam epitaxy

Abstract

In this study, we present the results of investigations on Schottky Au-GaN diodes by means of conventional DLTS and Laplace DLTS methods within the temperature range of 77 K–350 K. Undoped GaN layers were grown using the plasma-assisted molecular beam epitaxy technique on commercial GaN/sapphire templates. The quality of the epilayers was studied by micro-Raman spectroscopy (μ-RS) which proved the hexagonal phase and good crystallinity of GaN epilayers as well as a slight strain. The photoluminescence spectrum confirmed a high crystal quality by intense excitonic emission but it also exhibited a blue emission band of low intensity. DLTS signal spectra revealed the presence of four majority traps: two high-temperature and two low-temperature peaks. Using the Laplace DLTS method and Arrhenius plots, the apparent activation energy and capture cross sections were obtained. For two high-temperature majority traps, they were equal to E1 = 0.65 eV, σ1 = 8.2 × 10−16 cm2 and E2 = 0.58 eV, σ2 = 2.6 × 10−15 cm2 whereas for the two low-temperature majority traps they were equal to E3 = 0.18 eV, σ3 = 9.7 × 10−18 cm2 and E4 = 0.13 eV, σ4 = 9.2 × 10−18 cm2. The possible origin of the traps is discussed and the results are compared with data reported elsewhere.