Abstract

This paper reports a concise short-channel effect threshold voltage model using a quasi-2D approach for deep submicrometer double-gate fully-depleted SOI PMOS devices. By considering the hole density at the front and the back channels simultaneously, the analytical threshold voltage model provides an accurate prediction of the short-channel threshold voltage behavior of the deep submicrometer double-gate fully-depleted SOI PMOS devices as verified by 2D simulation results. The analytical short-channel effect threshold voltage model can also be useful for SOI NMOS devices.

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