Abstract

Electron and hole traps in MOCVD GaAs and the interface were investigated by Deep Level Transient Spectroscopy (DLTS and Photo-Excited DLTS. GaAs was grown under various conditions, different As/Ga mol fractions, and S-and-non-doping. Five electron traps and three holes traps were detected. A main electron trap is ET1MO, which is the same level as EL-2 = EB2 in VPE materials. Its density is dicussed as a function of an Ga/As mol fraction. A commonly observed hole trap is HT3MO, which turns out to be “Fe”. The emission rate was deduced as a fucntion of reciprocal temperature for each level and compared with other data so far published.

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