Abstract
Deep level transient spectroscopy (DLTS) and photo induced current transient spectroscopy (PICTS) are commonly used methods for the identification semiconductor impurities and defects. In this paper, a measurement system of DLTS and PICTS has been developed by LabVIEW. A series of different instruments construct this systems hardware (signal generator; current amplifier; capacitance meter; oscilloscope,etc.) while software is also easy to program by LabVIEW. This system demonstrates high generality for both DLTS and PICTS, and data acquired can be stored or read in computer. By contrast, it is much lower cost comparative to commercial DLTS or PICTS system. Testing result of silicon P+N junction coincides with semiconductor theory research.
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