Abstract

We studied the emissive pits in InGaN films grown on compressive and strain-free GaN underlying layers. Pit density decreased with the full width at half maximum of ω(0002) of InGaN. The films grew on compressive and strain-free GaN underlying layers with spiral and step-flow modes, respectively. Carbon impurities accumulated inside the pits. Comparison of cathodoluminescence inside the pits and steady-state photocapacitance spectra showed that the energy level of the carbon impurities appeared at ∼2.8 eV below the conduction band (Ec) for both types of pits. Deep-level defects at Ec −2.4 eV resulting in green fluorescence emission were considered to originate from pits related to screw dislocations.

Highlights

  • Indium gallium nitride alloy (InxGa1 xN) is an important material in light-emitting diodes (LEDs) and laser diodes with blue, green, and various other emission colors

  • Deep-level defects related to the emissive pits in thick InGaN films on GaN template and bulk substrates

  • The columnar growth mode is suppressed at a low growth rate,[4,5] thick InGaN films often grow with a spiral growth mode, and contain pits with a diameter of several micrometers in their surface

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Summary

Introduction

Indium gallium nitride alloy (InxGa1 xN) is an important material in light-emitting diodes (LEDs) and laser diodes with blue, green, and various other emission colors. Deep-level defects related to the emissive pits in thick InGaN films on GaN template and bulk substrates

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