Abstract

The great decrease of electron mobility with increasing sheet electron concentration nS>5×1015 m−2 in modulation-doped Al0.25Ga0.75As/GaAs/Al0.25Ga0.75As and Al0.25Ga0.75As/In0.19Ga0.81As/GaAs quantum wells is observed experimentally. At nS>1016 m−2 a conductivity decreases with increasing the sheet electron concentration. The calculations of electron mobility limited by polar optical (PO) phonon scattering show that the great increase of electron intrasubband scattering by emission of PO phonons when nS exceeds 1015 m−2 is responsible for the mobility and conductivity decrease. When nS changes in the range of 1015−1017 m−2, the alternate increase and decrease of channel conductivity is observed.

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