Decoupling criterion based on limited energy loss condition for groove measurement using optical scanning microscopes

Abstract

In confocal metrology, the lateral and axial responses are coupled in narrow regions near groove edges. This coupling results in an area with an uncertain profile, particularly for measurements of tight structures or deep grooves. In this paper, to delineate the area with measurement accuracy loss, an analytical model depicting the coupling relationships between the groove depth, the coupled portions and the NA of the objective used is introduced. Based on this model, the limited energy lost (LEL) decoupling criterion is presented that can enable users to choose suitable numerical apertures before performing measurements, predict the extents of the areas with measurement accuracy loss, and identify readout areas that yield accurate height measurements. The theory was verified by using confocal microscopes and is also applicable to far-field optical scanning metrology.