Abstract
The decomposition of P(CH 3) 3 adsorbed on Ru(0001) at 80 K is studied by soft X-ray photoelectron spectroscopy using synchrotron radiation. Using the chemical shifts in the P 2p core levels, we are able to identify various phosphorus-containing surface reaction products and follow their reactions on Ru(0001). It is found that P(CH 3) 3 undergoes a step-wise demethylation on Ru(0001), P(CH 3) 3 → P(CH 3) 2 → P(CH 3) → P, which is complete around ∼450 K. These results are compared with the decomposition of isostructural PH 3 and PCl 3 on Ru(0001). The decomposition of PH 3 involves a stable intermediate, labeled as PH x , and follows a reaction of: PH 3 → PH x → P, which is complete around ∼190 K. The conversion of chemisorbed phosphorus to ruthenium phosphide is observed and is complete around ∼700 K on Ru(0001). PCl 3 also follows a step-wise decomposition reaction, PCl 3 → PCl 2 → PCl → P, which is complete around ∼300 K. The energetics of the adsorption and the step-wise decomposition reactions of PH 3, PCl 3 and P(CH 3) 3 are estimated using the bond order conservation Morse potential (BOCMP) method. The energetics calculated using the BOCMP method agree qualitatively with the experimental data.
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