Abstract
The decomposition of alkoxymethylsilanes on a hot Mo wire was investigated within the temperature range of 1300–1600 K and at pressures of 12–90 Pa. Within the temperature range 1400–1600 K a rate law of first order was determined. The activation energy of the decomposition of was estimated to be 74.5 kJ mol−1. The rate constants of the ethoxy silane decomposition decreases with increasing as . From these results and the formed products as ethanol and ethene, a surface‐activated decomposition mechanism is proposed assuming a two‐center reaction of the alkoxy groups with the formed surface on the wire. By esr spectroscopic investigations of condensed radicals the formation of radicals as , and ROO• was confirmed.
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