Abstract

It is recognized that tetrafluoromethane (CF₄) has a great influence on global warming. The CF₄ is known to have a large impact on climate change due to its large global warming index. In this study, a waterjet plasma scrubber(WPS) was designed and manufactured for the CF₄ decomposition. The WPS is a novel technology which is combined a gliding arc plasma and water injection at the center of the plasma discharge. This can give an innovative way for CF₄ decomposition by achieving larger plasma columnand generating OH radicals. A performance analysis was achieved for the design factors such as waterjet flow rate, total gas flow rate, consumption electric power, and electrode gap. The highest CF4 decomposition and energy efficiencies were 64.8% and 6.43 g/kWh, respectively; Optimal operating conditions were 20 mL/min of waterjet flow rate, 200 L/min total gas flow rate, 5.3 kW consumption electric power, and 4.4 mm electrode gap. As for the 2 stage reactor of the WPS, the CF₄ decomposition efficiency improved as the 85.3% while the energy efficiency decreased as the 5.57 g/kWh.

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