Abstract
Polymers can be used as temporary place holders in the fabrication of embedded air gaps in a variety of electronic devices. Embedded air cavities can provide the lowest dielectric constant and loss for electrical insulation, mechanical compliance in devices where low-force deformations are desirable, and can temporarily protect movable parts during processing. Several families of polymers have been used as sacrificial, templating polymers including polycarbonates, polynorbornenes (PNBs), and polyaldehydes. The families can be distinguished by chemical structure and decomposition temperature. The decomposition temperature ranges from over 400 °C to below room temperature in the case of low ceiling temperature polymers. Overcoat materials include silicon dioxide, polyimides, epoxy, and bis-benzocyclobutene (BCB). The methods of air-gap fabrication are discussed. Finally, the use of photoactive compounds in the patterning of the sacrificial polymers is reviewed.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
