Abstract
We have experimentally studied the DC bias dependent frequency characteristics of surface acoustic wave (SAW) and Sezawa modes and their higher frequency modes up to 3.0 GHz, on AlGaN/GaN film SAW devices with different line widths and spacing ratio. By applying a DC bias signal to input and output interdigital transducer (IDT), the distribution of two-dimensional electron gas (2DEG) near the IDT electrodes is modulated and many pass bands can be observed in a wideband frequency range. These pass bands show interesting DC bias dependent frequency characteristics. In particular, pass bands at 1.92 and 2.1 GHz show remarkable ON/OFF switch operation in a DC bias voltage range from 0 to -20 V. Compared with AlGaN/GaN films SAW devices with the same line width to spacing ratio, ITD electrodes with different line width to spacing ratios are very effective for obtaining a good higher-mode-frequency response.
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