Abstract
In this article, the effects of the O2 ratio on the electrical characteristics, including the I-V characteristic curve, Panchen’s curve, and I-P curve, were tested in a sample of O2/Ar gaseous mixture . The sample was produced by plasma-based DC magnetron sputtering with niobium metal as a target material. The inter-electrode spacing value was 4 cm. Plasma diagnosis via the Optical Emission Spectroscopy (OES) method was used to achieve Te and Ne mixture values of 20 %, 30 %, 50%, and 70% in the Ar/O2 system. The results showed that the discharge is operating in the abnormal glow region and the discharge current was decreased by increasing O2 percentage. In addition, the experimental results showed that the discharge is optimal at 30% gas ratio. It was found that the electron temperature was decreased with increasing working pressure and increased with increasing the O2 percentage, while electron density was increased with increasing both working gas pressure and O2 percentage.
Highlights
Plasmas have been employed in many important applications during the last years, such as those of glasses, magnetic media, thin film material, semiconductor fabrication, etc [1, 2]
P, the characteristics of current and voltage show a Decreasing in current and increasing in plasma density,The best current value was at the ratio 30% .The Increase ratio of O2 to Ar due to increase in the values of breakdown voltage
The addition of O2 lead to the electron temperature decrease and the electron density increased with both increasing working gas pressure and O2 percentage
Summary
Plasmas have been employed in many important applications during the last years, such as those of glasses, magnetic media, thin film material, semiconductor fabrication, etc [1, 2]. The principle characteristics of plasma discharge, such as the I-V, I-P , and Paschen law (Vbr-pd) were studied as functions of inter-electrode spacing and gas pressure in the chamber.
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
