Abstract
This paper reports a method for measuring magnetostriction, Young's modulus of a substrate or film, and the /spl Delta/E effect with one apparatus. A substrate with a thin magnetic film deposited on it is in parallel with and cantilevered above a metal plate electrode, and they form a capacitive cell. The cantilever deflects due to its own weight and applied electric and magnetic fields. The small change of capacitance caused by this deflection is measured by a sensitive capacitance bridge. Young's modulus, magnetostriction, and /spl Delta/E effect can be calculated by a theoretical analysis with the measured deflection data.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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