Abstract
DC bias dependent acoustic resonance phenomena have been observed in micromachined tunable thin film capacitors based on Ba <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.3</sub> Sr <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.7</sub> TiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> (BST) thin films. The antiresonance frequency is only weakly DC bias dependent, whereas the resonance frequency exhibits a strong dependence on the applied dc bias. The resonance frequency shifted by 0.8% for a frequency of about 3.44 GHz and an applied of 333 KV/cm. At the same time the electromechanical coupling constant k <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</sub> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> increased to 1.8%. The experimental observations correlate well with the theoretical predictions derived from the free energy P expansion using Landau theory.
Published Version
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