Database of relativistic elastic scattering cross‐sections for calculations of photoelectron and Auger electron transport

Abstract

AbstractQuantitative applications of electron spectroscopies, AES and XPS, should be based on theoretical models describing realistically the electron transport in solids. Detailed knowledge of elastic scattering cross‐sections due to the elements constituting a given solid is necessary in such calculations. To some extent, such data are available in the literature, but a complete data set in the form of a computer controlled database is not available. An extensive software packet is described in the present article for providing relativistic elastic scattering cross‐sections for elements with atomic numbers up to 96. The energy range for each element varies from 50 to 10000 eV in steps of 1 eV. The software packet has the following options: (1) visualization of the differential elastic scattering cross‐sections in different coordinate systems; (2) creation of files containing the elastic scattering cross‐sections for specified elements, energies, and coordinates; (3) creation of random number generators providing the polar scattering angles to be used in Monte‐Carlo simulation of the transport of electrons in solids; and (4) testing the performance of the created random number generators.