Database in low temperature plasma modeling

Abstract

This article is composed of recommended sets of electron collision cross-sections and reaction cross-sections of excited species assessed by a swam method and of information on transport coefficients and reaction rates (cross-sections) of ions, which are needed in low temperature plasma modeling. These data have been piled up by the Investigation Committee on “Discharge Plasma Electron Collision Cross-sections”, IEE Japan, and the author’s laboratory. The gases taken for the assessment in this work are rare gases, Hg, N 2, O 2, CO 2, CF 4, CH 4, GeH 4, SiH 4, SF 6, C 2H 6, Si 2H 6, c-C 4F 8 and CCl 2F 2.