Abstract
Fault detection prediction of FAB (wafer fabrication) process in semiconductor manufacturing process is possible that improve product quality and reliability in accordance with the classification performance. However, FAB process is sometimes due to a fault occurs. And mostly it occurs “pass”. Hence, data imbalance occurs in the pass/fail class. If the data imbalance occurs, prediction models are difficult to predict “fail” class because increases the bias of majority class (pass class). In this paper, we propose the SMOTE (Synthetic Minority Oversampling Technique) based over sampling method for solving problem of data imbalance. The proposed method solve the imbalance of the between pass and fail by oversampling the minority class of fail. In addition, by applying the fault detection prediction model to measure the performance.
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