Data for Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy, Scientific Reports

Abstract

This data is used in the paper 'Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy' published in Scientific Reports.Fig.1d: I-V curve of pristine device showing an initial high resistive state Fig.1e: Low resistive state device (Inset: electroforming step). Fig.3c: Ti 2p NEXAFS spectra extracted from the TiOx film Fig.3d: O 1s NEXAFS spectra extracted from the TiOx film Fig.5d: Ti 2p NEXAFS spectra extracted from the regions circled in the X-ray images b and c. Fig.5e: O 1s NEXAFS spectra extracted from the regions circled in the X-ray images b and c. Fig.7a: Ti 2p NEXAFS spectra for color-coded composition maps Fig.7b: O 1s NEXAFS spectra for color-coded composition maps Fig.7c: Ti 2p and O 1s NEXAFS spectra for color-coded composition maps