Data Driven Adaptive Control with Hysteresis Input for a Piezo-Actuated Stage

Abstract

As a core component in the micro/nano-manufacturing, the piezo-actuated stage has superior performance of ultra-precision positioning, fast response and compact size. However, the inherent nonlinearity, such as hysteresis and creep characteristics, in the piezo-actuated stage impacts its positioning precision severely. To eliminate the impact of the nonlinearity of a piezo-actuated stage, a data driven adaptive control method with hysteresis input is proposed in this paper. An unknown nonlinear function with hysteresis input is adopted to depict the piezo-actuated stage. Then, the undetermined parameters of the controller are adjusted online by using the input and output measured data. Finally, the availability of the proposed control method have been demonstrated by a series of experiments compared with a hysteresis inverse compensation-based model reference adaptive control method and a classical model free adaptive control method.