Data compilation for depth distribution of ion-induced damage and ion-implanted atoms

Abstract

Experimental data on depth distribution of ion-induced damage and ion-implanted atoms are collected and compared with theoretical prediction represented by E-DEP-1 computer code. It is recognized in general that the experimentally observed damage peak is-deeper than that calculated by E-DEP-1 using the LSS electronic stopping parameter, kLSS. Agreement between observation and calculation can be obtained using a modified electronic stopping parameter k = 0.8—0.9 kLSS. With regard to the implanted atoms in ion bombardment, the peak of the observed distribution is deeper in some cases and shallower in other cases than that calculated by E-DEP-1, indicating that the modified electronic stopping parameter k is oscillating relative to kLSS.