Abstract
Dark Current Spectroscopy is tested for the first time on irradiated CMOS Image sensors (CIS) to detect and identify radiation-induced silicon bulk defects. Two different pinned photodiode CIS are tested: a 5MP Commercial-Off-The-Shelf (COTS) CIS from OmniVision (OV5647) and a $256\times 256$ pixel custom CIS. These CISs are irradiated with alpha particles at various fluences and at two different particle energies in the custom CIS (4 MeV or < 500 keV). Several defect types are detected in both CIS (up to five in the custom CIS). The identity of the defects is investigated by measuring the activation energy of the dark current and the stability of the defects during an isochronal annealing. Two defects are identified in the custom CIS: the divacancy and the vacancy-phosphorus. This work proves that dark current spectroscopy can be used on irradiated CIS to detect and identify radiation-induced silicon bulk defects.
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